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3D surface profilometry using neutral helium atoms
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DOI：10.1063/5.0206374.png)
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摘要
En 中文
Three-dimensional mapping of surface structures is important in a wide range of biological, technological, healthcare, and research applications. Neutral helium atom beams have been established as a sensitive probe of topography and have already enabled structural information to be obtained from delicate samples where conventional probes would cause damage. Here, we empirically demonstrate, for the first time, a reconstruction of a complete surface profile using measurements from a modified scanning helium microscope using the heliometric stereo method and a single detector instrument geometry. Results for the surface profile of tetrahedral aluminum potassium sulfate crystals demonstrate that the areas of surfaces and facet orientations can be recovered to within 5% of the expected values.
Keyword:
SCANNING-ELECTRON-MICROSCOPY
PARADIGM SHIFTS
DIFFRACTION
ROUGHNESS
METROLOGY
期刊
IF:
3.6
论文数:
10.4W
被引数:
17.8W
机构
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