.png){kind=icon}
返回
A cascade Twyman interferometer with active compensation for systematic errors
.png){kind=icon}
PRE
AI
DOI：10.1016/j.optlaseng.2025.108822.png)
.png){kind=icon}
原文求助.png){kind=icon}
分享.png){kind=icon}
收藏
摘要
En 中文
We propose a new interferometer system, the cascade Twyman interferometer (CTI), that can actively compensate for systematic errors. It adds an extra channel to the Twyman interferometer and uses polarized beam interference to separate the three beams. Subsequently, three interferograms, or two-by-two interferences of the three beams, can be obtained. Finally, the absolute surface distribution of the test mirror is calculated using the three-flat mutual inspection. The simulation showed that the CTI was only affected by the wavefront transmission error, which was negligible. In the experiment, the RMS repeatability of CTI was <10-4 lambda. Meanwhile, compared with the even and odd function methods, the results were similar, with a difference between the Zernike coefficients of <0.0028 lambda. This indicates that CTI is an efficient and accurate interferometer.
Keyword:
Interferometry
Twyman interferometer
Systematic errors
Absolute measurement
期刊
IF:
3.7
论文数:
7.3K
被引数:
1.7W
机构
暂无机构信息
引用论文
.png){kind=icon}
Full-aperture surface reconstruction method for shift-rotation absolute measurement with tilt error suppression倾斜误差抑制的移位旋转绝对测量全孔径曲面重构方法
PREAI
分享收藏
查看更多内容