.png){kind=icon}
返回
A Ceramic Diffusion Bonding Method for Passive LC High-Temperature Pressure Sensor
.png){kind=icon}
OA
AI
DOI：10.3390/s18082676.png)
.png){kind=icon}
.png){kind=icon}
分享.png){kind=icon}
收藏
摘要
En 中文
Alumina ceramic is a highly promising material for fabricating high-temperature pressure sensors. In this paper, a direct bonding method for fabricating a sensitive cavity with alumina ceramic is presented. Alumina ceramic substrates were bonded together to form a sensitive cavity for high-temperature pressure environments. The device can sense pressure parameters at high temperatures. To verify the sensitivity performance of the fabrication method in high-temperature environments, an inductor and capacitor were integrated on the ceramic substrate with the fabricated sensitive cavity to form a wireless passive LC pressure sensor with thick-film integrated technology. Finally, the fabricated sensor was tested using a system test platform. The experimental results show that the sensor can realize pressure measurements above 900 degrees C, confirming that the fabricated sensitive cavity has excellent sealing properties. Therefore, the direct bonding method can potentially be used for developing all-ceramic high-temperature pressure sensors for application in harsh environments.
Keyword:
alumina ceramic
diffusion bonding
sensitive cavity
pressure sensor
high-temperature application
AI总结
对已上传原文的论文进行重点信息的提取，主要内容包括：简要概述、研究摘要、背景介绍、关键亮点、图文解析、展望与总结。
期刊
IF:
3.5
论文数:
7.2W
被引数:
20.9W
机构
引用论文
A Harsh Environment-Oriented Wireless Passive Temperature Sensor Realized by LTCC Technology.png)
SENSORSOAAI
SENSORSIF3.5
OAAI分享收藏A Wireless Passive Pressure Microsensor Fabricated in HTCC MEMS Technology for Harsh EnvironmentsSENSORSOAAI
SENSORSIF3.5
OAAI分享收藏Passive Wireless Sensor Applications for NASA's Extreme Aeronautical EnvironmentsIEEE SENSORS JOURNAL
IEEE SENSORS JOURNALIF4.5
PREAI
分享收藏Advanced monoenergetic reconstruction technique in dual-energy computed tomography for evaluation of vascular anatomy before adrenal vein sampling双能量计算机断层扫描中先进的单能量重建技术，用于肾上腺静脉采血前的血管解剖评估
PREAI
分享收藏
查看更多内容