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A Compact and High-Precision Capacitive Absolute Angular Displacement Sensor
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DOI：10.1109/JSEN.2020.2996257.png)
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摘要
En 中文
The present work proposes a compact capacitive absolute angular displacement sensor design that adopts a stator and rotor configuration with a double capacitive ring structure, where the outer ring iscomposed of nmeasurement periods that function as a fine measurement component, providing high precision measurements. The inner ring is composed of a single measurement period that functions as a coarse measurement component, thereby providing an absolute positionmeasurement. Highmeasurement accuracy is obtained by adopting single-row excitation electrodes with induction electrodes that adopt a differential sensing structure to eliminate common-mode interference. In addition to the double-ring structure, the compact size of the proposed sensor is facilitated by integrating the electrodes of the stator and rotor and the peripheral circuits required for their respective signal processing using printed circuit board technology. A prototype of the proposed sensor is fabricated with outer and inner radii, and aggregate thickness dimensions of 30 mm, 7 mm, and less than 10 mm, respectively. The sensor design is optimized accordingly by increasing the radial interval between the outer and inner rings and adding shielding. Finally, the experimental results show that the optimized sensor design achieves a precision of 12 and resolution of 0.31over the fullmeasurement range of 0 degrees to 36 degrees. As such, the proposed sensor design is demonstrated to realize the small mechanical dimensions suffered by absolute angular displacement sensors. Accordingly, the relatively
Keyword:
Electrodes
Displacement measurement
Position measurement
Periodic structures
Magnetic field measurement
Capacitive sensors
Capacitive sensor
absolute angular displacement
compact structure
high-precision
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期刊
IF:
4.5
论文数:
2.2W
被引数:
7.3W
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引用论文
Sensing Mechanism and Error Analysis of a Capacitive Long-Range Displacement Nanometer Sensor Based on Time Grating.png)
IEEE SENSORS JOURNAL
IEEE SENSORS JOURNALIF4.5
PREAI
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