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A Differential Split-Type Pressure Sensor for High-Temperature Applications
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DOI：10.1109/ACCESS.2021.3055729.png)
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摘要
En 中文
This study proposes a split-type pressure sensor based on differential capacitance that can be applied to in-situ accurate pressure testing in high-temperature environments. The sensor is mainly composed of a high-temperature resistant chip and a high-temperature resistant encapsulation structure. The chip is made of a ceramic substrate and presents a differential capacitance structure that can withstand high temperatures and effectively restrain the temperature drift. The encapsulation presents a split-type structure, in which the chip and the test circuit board are placed at the front and back ends of the sensor, respectively. Therefore, the front end of the sensor can work in the high-temperature area for in-situ testing, while the back-end temperature remains below 60 degrees C all the time, which ensures normal operation of the circuit board. Finally, the test results show that the pressure sensor's temperature drift coefficient is only 6.6% within the temperature range of 25 degrees C-400 degrees C. The sensor's sensitivity can reach 9.27 mV/kPa and the maximum repeatability error is less than 2.2% at 400 degrees C, which shows that the proposed sensor has a higher working temperature and higher precision than the existing pressure sensors.
Keyword:
Temperature sensors
Temperature measurement
Pressure measurement
Capacitance
Ceramics
Plasma temperature
Substrates
Alumina ceramic
differential capacitance
split-type sensor
pressure measurement
high temperature environment
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期刊
IF:
3.6
论文数:
9.8W
被引数:
29.4W
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