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A high numerical aperture, polymer-based, planar microlens array
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DOI：10.1364/OE.17.019908.png)
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We present a novel microfabrication approach for obtaining arrays of planar, polymer-based microlenses of high numerical aperture. The proposed microlenses arrays consist of deformable, elastomeric membranes that are supported by polymer-filled microchambers. Each membrane/microchamber assembly is converted into a solid microlens when the supporting UV-curable polymer is pressurized and cured. By modifying the microlens diameter (40-60 mu m) and curing pressure (7.5-30 psi), we demonstrated that it is possible to fabricate microlenses with a wide range of effective focal lengths (100-400 mu m) and numerical apertures (0.05-0.3). We obtained a maximum numerical aperture of 0.3 and transverse resolution of 2.8 mu m for 60 mu m diameter microlenses cured at 30 psi. These values were found to be in agreement with values obtained from opto-mechanical simulations. We envision the use of these high numerical microlenses arrays in optical applications where light collection efficiency is important. (C) 2009 Optical Society of America
Keyword:
FABRICATION
REPLICATION
RESOLUTION
MICROCHIP
SILICON
LAYER
期刊
IF:
3.3
论文数:
6.1W
被引数:
14.3W
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