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A high-sensitivity pressure sensor based on surface transverse wave
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DOI：10.1016/j.sna.2012.08.017.png)
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摘要
En 中文
A new scheme for STW-based pressure sensors with high performance has been proposed. Different from the conventional analytical procedure using the perturbation theory, the pressure-induced frequency shifts for STW on quartz is obtained utilizing a Green's function simulator and the effective material constants dependent on pressure biasing have been calculated by the finite element method (FEM). The normalized pressure sensitivity (NPS) of STW on quartz as a function of the cut orientation in vicinity of BT-cut quartz has also been calculated, and the calculated results demonstrate that all the NPS on the given cut-orientation are 3 times higher than the commonly used ST-cut quartz of Rayleigh mode. To further improve the whole performance of the sensor, an optimized sensor configuration with an equi-intensity cantilever is proposed, whose geometry has been determined by using FEM software. The experimental results demonstrate that the pressure sensitivity of the proposed STW-based pressure sensors is sufficiently high and the relative frequency shift varies linearly with pressure loading. (C) 2012 Elsevier B.V. All rights reserved.
Keyword:
Surface transverse wave
Pressure sensor
Equi-intensity cantilever
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期刊
IF:
4.9
论文数:
1.5W
被引数:
3.3W
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