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A highly efficient nanofocusing system for soft x rays

delete2020-10-14
delete10
PRE
AI
Y
Yoko Takeo *
H
Hiroto Motoyama
T
Takenori Shimamura
T
T. Kimura
T
Takehiro Kume
Y
Yusuke Matsuzawa
T
Takahiro Saito
Y
Yoichi Imamura
H
Hiroaki Miyashita
K
Kentaro Hiraguri
H
Hirokazu Hashizume
Y
Yasunori Senba
H
Hikaru Kishimoto
H
Haruhiko Ohashi
H
Hidekazu Mimura *
DOI:10.1063/5.0027118delete
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摘要

摘要

En 中文
The focusing of x rays is essential in various types of x-ray microscopy because the size and flux of the illuminating beam determine the spatial resolution and signal intensity, respectively. A system with grazing incidence mirrors allows highly efficient x ray focusing with beam dimensions on the nanometer scale. Tube-shaped mirrors with a large numerical aperture and high demagnification, including ellipsoidal mirrors and Wolter mirrors, have recently been developed for soft x-ray nanofocusing. However, these mirrors have low efficiency because they cannot focus the central part of the illumination beam. Here, we propose a two-stage focusing system, in which a ring-shaped beam formed by a ring-focusing mirror illuminates a quasi-Wolter mirror. A prototype of the system is experimentally constructed at beamline BL25SU-A of SPring-8. Observation of the wavefront error based on ptychography enables efficient alignment of the two mirrors. Using this alignment procedure, we achieve a spot size of less than 200nm at 300eV.
Keyword:
FREE-ELECTRON LASER
PTYCHOGRAPHIC CHARACTERIZATION
FIELD
BEAMLINE
AI总结

AI总结

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期刊

Applied Physics Letters 封面图
Applied Physics Letters
IF:
3.6
论文数:
10.4W
被引数:
17.8W

机构

U
University of Tokyo
学者数:
7.1W
论文数: 6.5W
被引数: 2.2K
J
Japan Synchrotron Radiation Research Institute
学者数:
1.9K
论文数: 2.7K
被引数: 2.9K
引用论文

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