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A highly efficient nanofocusing system for soft x rays
DOI:10.1063/5.0027118.png)
摘要
En 中文
The focusing of x rays is essential in various types of x-ray microscopy because the size and flux of the illuminating beam determine the spatial resolution and signal intensity, respectively. A system with grazing incidence mirrors allows highly efficient x ray focusing with beam dimensions on the nanometer scale. Tube-shaped mirrors with a large numerical aperture and high demagnification, including ellipsoidal mirrors and Wolter mirrors, have recently been developed for soft x-ray nanofocusing. However, these mirrors have low efficiency because they cannot focus the central part of the illumination beam. Here, we propose a two-stage focusing system, in which a ring-shaped beam formed by a ring-focusing mirror illuminates a quasi-Wolter mirror. A prototype of the system is experimentally constructed at beamline BL25SU-A of SPring-8. Observation of the wavefront error based on ptychography enables efficient alignment of the two mirrors. Using this alignment procedure, we achieve a spot size of less than 200nm at 300eV.
Keyword:
FREE-ELECTRON LASER
PTYCHOGRAPHIC CHARACTERIZATION
FIELD
BEAMLINE
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期刊
IF:
3.6
论文数:
10.4W
被引数:
17.8W
机构
引用论文
Achromatic and high-resolution full-field X-ray microscopy based on total-reflection mirrors
OPTICS EXPRESS
IF3.3

