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A Load-Lock-Compatible Nanomanipulation System for Scanning Electron Microscope
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DOI：10.1109/TMECH.2011.2166162.png)
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This paper presents a nanomanipulation system for operation inside scanning electron microscopes (SEM). The system is compact, making it capable of being mounted onto and demounted from an SEM through the specimen-exchange chamber (load-lock) without breaking the high vacuum of the SEM. This advance avoids frequent opening of the high-vacuum chamber, thus, incurs less contamination to the SEM, avoids lengthy pumping, and significantly eases the exchange of end effectors (e. g., nanoprobes and nanogrippers). The system consists of two independent 3-DOF Cartesian nanomanipulators driven by piezomotors and piezoactuators. High-resolution optical encoders are integrated into the nanomanipulators to provide position feedback for closed-loop control. The system is characterized, yielding the encoders' resolution of 2 nm and the piezoactuators' resolution of 0.7 nm. A look-then-move control system and a contact-detection algorithm are implemented for horizontal and vertical nanopositioning.
Keyword:
Contact detection
nanomanipulation system
scanning electron microscope (SEM)
system characterization
visual servoing
期刊
I
IF:
7.3
论文数:
5.5K
被引数:
2.4W
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A millimeter-sized nanomanipulator with sub-nanometer positioning resolution and large force output
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