.png){kind=icon}
返回
A MEMS multi-sensor chip for gas flow sensing
.png){kind=icon}
PRE
AI
DOI：10.1016/j.sna.2004.12.022.png)
.png){kind=icon}
原文求助.png){kind=icon}
分享.png){kind=icon}
收藏
摘要
En 中文
This paper reports the development of a MEMS multi-sensor chip that enables the simultaneous measurements of shear stress, pressure, and temperature inside microchannels. On the multi-sensor chip, five sensor clusters, which consist of shear-stress, pressure, and temperature sensors, are arranged in a one-dimensional array. The multi-sensor chip has been characterized in a rectangular microchannel using both incompressible and compressible gas flows. A simple normalization method has proven to be effective in the reduction of the sensitivity variation of the shear-stress sensors. It has also been found out that the classical theory for conventional hot-film sensors needs to be modified for the MEMS thermal shear-stress sensors. Furthermore, flow rate measurements based on both differential pressure and thermal anemometry principles have been demonstrated using the multi-sensor chip. (c) 2004 Elsevier B.V. All rights reserved.
Keyword:
flow sensor
shear-stress sensor
pressure sensor
temperature sensor
microchannel flow
AI总结
对已上传原文的论文进行重点信息的提取，主要内容包括：简要概述、研究摘要、背景介绍、关键亮点、图文解析、展望与总结。
期刊
IF:
4.9
论文数:
1.6W
被引数:
3.3W
机构
暂无机构信息
引用论文
.png){kind=icon}
没有更多内容
没有更多内容