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A Micropower Front End for Three-Axis Capacitive Microaccelerometers
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DOI：10.1109/TIM.2009.2018700.png)
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This paper presents the measurement results of a micropower switched-capacitor front end that was designed for three-axis capacitive microaccelerometers. The designed front end can reduce the distorting effects of the electrostatic forces and can be used in single-ended and differential modes. The front end was realized with a 0.13-mu m bipolar complimentary metal-oxide-semiconductor process. The silicon area of the front end is 0.30 mm(2). The measurements show that the functionality of the front end follows the theory in both modes. Consuming 20 mu A from a 1.8-V supply, it achieves noise densities of 424, 607, and 590 mu g/root Hz in the x-, y-, and z-directions, respectively, when each mass is sampled at 1 kHz in the differential mode.
Keyword:
Electrostatic forces
low-power circuit
sensor front end
switched-capacitor circuit
three-axis capacitive accelerometer
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5.9
论文数:
2.0W
被引数:
5.8W
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