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A miniature, high-sensitivity, electron tunneling accelerometer

delete1996-05-01
delete39
PRE
AI
R
Rockstad, HK *
T
Tang, TK
R
Reynolds, JK
K
Kenny, TW
K
Kaiser, WJ
G
Gabrielson, TB
DOI:10.1016/0924-4247(96)01128-4delete
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摘要

摘要

En 中文
Prototype low-noise miniature accelerometers have been fabricated with electron-tunneling transducers. The electron-tunneling transducer permits detection of small displacements of the proof mass with high electrical response; such a transducer is essential for a high-performance miniature accelerometer. Prototype accelerometers have shown self-noise of approximately 10(-7) g (Hz)(-1/2) or less between 10 and 200 Hz, and close to 10(-8) g (Hz)(-1/2) near the resonance frequency of 100 Hz. Directivity measurements give nulls at least 50 dB below the maximum. A dual-axis prototype designed for underwater acoustic applications is packaged in an 8 cm(3) volume with a mass of 8 g.
Keyword:
electron tunneling
accelerometers
micromachining
hydrophones
acoustic sensors
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Sensors and Actuators A-Physical 封面图
Sensors and Actuators A-Physical
IF:
4.9
论文数:
1.6W
被引数:
3.3W

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