.png){kind=icon}
返回
A monolithic three-axis SOI-accelerometer with uniform sensitivity
.png){kind=icon}
PRE
AI
DOI：10.1016/j.sna.2005.02.032.png)
.png){kind=icon}
原文求助.png){kind=icon}
分享.png){kind=icon}
收藏
摘要
En 中文
This paper describes design and fabrication of a capacitive three-axis accelerometer. The devices are bulk micromachined from SOI-wafers by DRIE, and are protected by glass encapsulation. The design is optimised to give direction independent resolution and frequency response, i.e. identical properties in all directions. (C) 2005 Elsevier B.V All rights reserved.
Keyword:
accelerometer
SOI
direction independent
inertial sensor
three-axis
bulk micromachining
AI总结
对已上传原文的论文进行重点信息的提取，主要内容包括：简要概述、研究摘要、背景介绍、关键亮点、图文解析、展望与总结。
期刊
IF:
4.9
论文数:
1.6W
被引数:
3.3W
机构
暂无机构信息
.png){kind=icon}
