.png){kind=icon}
返回
A Multi-Parameter Microfluidic Particle Sensor Based on Permalloy for High Sensitivity
.png){kind=icon}
PRE
AI
DOI：10.1109/TIM.2022.3154795.png)
.png){kind=icon}
原文求助.png){kind=icon}
分享.png){kind=icon}
收藏
摘要
En 中文
Technologies for particle detection in lubricating or hydraulic oil are essential in mechanical industries to avoid constant machinery failure. The existing technologies utilize offline or online methods. Some of the online methods either have weak sensitivity or can only detect one type of particle. This article presents a highly sensitive, multi-parameter sensor for detecting various particles in hydraulic oil. This design takes advantage of high magnetic permeability and shielding efficiency of permalloy, placed behind dual opposite planar coils with a straight microchannel structure to improve the sensitivity of the sensor. The design includes both an inductive mode sensor, which can detect and distinguish ferromagnetic and nonferromagnetic metallic particles, and a capacitive mode sensor, which can detect and distinguish air bubbles and water droplets. Comparative COMSOL simulation and experiment were used to investigate the effect of permalloy and the results show that the sensor with permalloy has higher sensitivity compared to the sensor without permalloy. The sensor with permalloy successfully detected 15-mu m iron particle, 55-mu m copper particle, 75-mu m water droplet, and 95-mu m air bubble. This research shows the application of permalloy in the sensitivity improvement of microfluidic sensors.
Keyword:
Capacitive sensor
high sensitivity
inductive sensor
particle detection
permalloy
期刊
IF:
5.9
论文数:
2.0W
被引数:
5.8W
机构
引用论文
An Integrated Inductive-Capacitive Microfluidic Sensor for Detection of Wear Debris in Hydraulic Oil.png)
IEEE SENSORS JOURNAL
IEEE SENSORS JOURNALIF4.5
PREAI
分享收藏
An integrated approach to fault diagnosis of machinery using wear debris and vibration analysisWEAR
WEARIF6.1
PREAI
分享收藏Integration of epitaxial permalloy on Si (100) through domain matching epitaxy paradigm通过畴匹配外延范式在Si (100) 上集成外延坡莫合金
PREAI
分享收藏分享收藏High-Throughput Sensor to Detect Hydraulic Oil Contamination Based on Microfluidics基于微流体的高通量液压油污染检测传感器IEEE SENSORS JOURNAL
IEEE SENSORS JOURNALIF4.5
PREAI
分享收藏
查看更多内容