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A robust white-light interference signal leakage sampling correction method based on wavelet transform
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DOI：10.1016/j.optlaseng.2020.106156.png)
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摘要
En 中文
White-light scanning interferometry has become a well-established tool for measuring the microscopic three-dimensional morphology of objects. However, it is sensitive to external disturbances and suffers from leakage sampling, which compromises the accuracy of the measurements. To avoid the error, a robust correction method is proposed, based on wavelet transform, to find leakage sampling point (LSP), and the cubic spline interpolation method is used to complete the interference signal to achieve the signal correction. Further, phase evaluation at each pixel provides a high vertical resolution to characterize the microstructure. In addition, the proposed method exhibits a good denoising performance. Simulations and comparison experiments demonstrate the effectiveness of the proposed method.
Keyword:
White-light interference
Leakage sampling
Signal correction
Wavelet transform
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