.png){kind=icon}
.png){kind=icon}
Return
A surface acoustic wave tag utilizing a multilayer structure of SiO2/Pt/128°YX-LiNbO3 for operation at 600 °C
.png){kind=icon}
OA
AI
Z
R
D
C
H
T
DOI：10.1038/s41378-025-01084-1.png)
.png){kind=icon}
.png){kind=icon}
Share.png){kind=icon}
Save
Abstract
En 中文
This study addresses the issue of traditional surface acoustic wave (SAW) tag failure under high-temperature conditions by proposing a SAW tag based on a multilayer structure of SiO2/Pt/128°YX-LiNbO3. The structure has been simulated using the finite element method/wave-number domain analysis (FEM/WDA) approach, which reveal the effects of reflector topological parameters on the scattering characteristics of SAWs. Compared with Pt/128°YX-LiNbO3, the bulk wave scattering in the multilayer structure is reduced by 50%. In the micro-nanofabrication of the tag, a low-roughness, high-density SiO2 film is prepared using physical vapor deposition (PVD). Test results indicate that the tag exhibits a temperature coefficient of frequency (TCF) of −32.38 ppm/°C over a wide temperature range of 30–600°C. After undergoing thermal shock at 600 °C for 336 h, the time-domain reflection amplitude decreases by less than 1%, demonstrating that the SiO2 protective layer effectively suppresses the high-temperature decomposition of LiNbO3 and reduces the agglomeration rate of Pt electrodes. Experimental results confirm that the proposed high-temperature-resistant SAW tag maintains stable performance under prolonged exposure to 600 °C environments. The tag has been installed on the surface of a steel ladle in a steel plant, demonstrating excellent reliability in a vacuum degassing environment.
Keywords:
Electrical and electronic engineering
Sensors
Engineering
general
AI Summary
Key information extracted from the uploaded paper, including a brief overview, abstract, background, key highlights, visual analysis, and future outlook.
Journal
M
IF:
9.9
Papers:
1.3K
Citations:
6.7K
Organization
Cited Papers