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A Vertically Integrated CMOS Microsystem for Time-Resolved Fluorescence Analysis
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DOI：10.1109/TBCAS.2010.2077290.png)
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We describe a two-chip micro-scale time-resolved fluorescence analyzer integrating excitation, detection, and filtering. A new 8 8 array of drivers realized in standard low-voltage 0.35-mu m complementary metal-oxide semiconductor is bump-bonded to AlInGaN blue micro-pixellated light-emitting diodes (micro-LEDs). The array is capable of producing sample excitation pulses with a width of 777 ps (FWHM), enabling short lifetime fluorophores to be investigated. The fluorescence emission is detected by a second, vertically-opposed 16 4 array of single-photon avalanche diodes (SPADs) fabricated in 0.35-mu m high-voltage CMOS technology with in-pixel time-gated photon counting circuitry. Captured chip data are transferred to a PC for further processing, including histogramming, lifetime extraction, calibration and background/noise compensation. This constitutes the smallest reported solid-state microsystem for fluorescence decay analysis, replacing lasers, photomultiplier tubes, bulk optics, and discrete electronics. The system is demonstrated with measurements of fluorescent colloidal quantum dot and Rhodamine samples.
Keyword:
Biophotonics
biosensors
complementary metal-oxide semiconductor (CMOS) integrated circuits (ICs)
fluorescence
fluorescence lifetime
GaN micro-light-emitting diodes
single-photon avalanche diodes
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