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Absolute three-dimensional coordinate measurement by the two-point diffraction interferometry
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DOI：10.1364/OE.15.004435.png)
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摘要
En 中文
We describe a method of absolute xyz-coordinates measurement based on the two-point diffraction interferometer. In this paper we use a new optimization algorithm to the interferometer. Experimental results show that the systematic error of the interferometer is less than 1 mu m (peak-to-valley value) within a 60 mm by 60 mm by 20 mm working volume. To extract the systematic error and verify the absolute performance of the interferometer we applied the Fourier self-calibration concept. (c) 2007 Optical Society of America.
Keyword:
DISTANCE MEASUREMENT
WAVELENGTH SHIFT
LASER-DIODE
CALIBRATION
PRECISION
