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摘要
En 中文
Current dynamic techniques for measuring fluid shear viscosities using quartz, or other piezoelectrics, rely on the resonator surface being exposed to a measurand bath whose extent greatly exceeds the penetration depth of the evanescent shear mode excited by the active element. This configuration allows the effect of the loading parameters to be expressed concisely. Perturbation of the electrical equivalent circuit parameters of the resonator by the fluid loading permits calculation of the mass density - shear viscosity product. In this paper, we explore the interesting, albeit more complicated situation where the separation between the resonator and a confining wall is less than the penetration depth of the fluid occupying the intervening region. It turns out that the resonator perturbation in this case is a sensitive function of the separation. This important fact permits extreme miniaturization, since for gases between 200K and 400K, pressures between 0.01 to 100 atm, and frequencies between 10 MHz and 1 GHz, the penetration depth varies from micrometers to nanometers. Variations in the spacing is effected by using a second, nonresonant piezoelectric as the wall. Micro-electro-mechanics (MEMS) versions of viscometers and associated types of fluid sensors are thereby enabled.
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