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Adaptive and deterministic laser polishing enabled by in-process interferometric feedback
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DOI：10.1016/j.ijmachtools.2026.104398.png)
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Abstract
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• A measurement-driven feedback laser-finishing framework is established. • Deterministic surface control is enabled without relying on a precisely calibrated stationary removal function. • On-machine white-light interferometry is integrated with ultrashort-pulse laser processing system. • Single-crystal diamond is selected as a stringent benchmark material to validate the method under the most demanding conditions. • Areal roughness on single-crystal diamond is markedly reduced from Sa=82.6nm to Sa=23.1nm with high material yield.
Keywords:
Adaptive feedback processing
On-machine measurement
Laser polishing
Interferometry
Ultrashort-pulse laser
Diamond
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