An integrated gas sensor technology using surface micro-machining

P.C.H. Chan

doi:10.1016/S0925-4005(01)01064-4

An integrated gas sensor technology using surface micro-machining

2002-02-01

68

PRE

AI

DOI：10.1016/S0925-4005(01)01064-4

原文链接

原文求助

摘要

En 中文

We report the first silicon based integrated gas sensor technology using surface micro-machined micro-hotplate (MHP). In this work, the thermally isolated hotplate was fabricated using surface silicon micro-machining technique. Various etching window designs for the polysilicon sacrificial etch were also explored to optimize the surface micro-machining process yield. The front-side surface micromachined MHP provide excellent manufacturing yield compared to the bulk micro-machined counterpart and at the same time retains all the desirable thermal characteristics that are essential to the integrated gas sensor application. Integrated gas sensors with sensitivity down to 1 ppm of carbon monoxide were demonstrated using this technology. This approach has been extended to integrated gas sensor array. (C) 2002 Elsevier Science B.V. All rights reserved.

Keyword:

integrated sensor

gas sensor

surface micro-machine

micro-hotplate

carbon monoxide sensor

An integrated gas sensor technology using surface micro-machining

摘要

AI总结

期刊

机构

引用论文