Atomic force microscopy with qPlus sensors

Franz J. Gießibl

doi:10.1557/s43577-023-00654-w

2024-03-01

Franz J. Gießibl *

DOI：10.1557/s43577-023-00654-w

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摘要

En 中文

Atomic force microscopy is one of the most important tools in nanoscience. It employs an atomic probe that can resolve surfaces with atomic and subatomic spatial resolution and manipulate atoms. The qPlus sensor is a quartz-based self-sensing cantilever with a high stiffness that, in contrast to Si cantilevers, allows to oscillate at atomic radius amplitudes in the proximity of reactive surfaces and thus provides a high spatial resolution. This article reports on the development of this sensor and discusses applications in materials research.

Keyword:

Crystallographic structure

Microelectromechanical systems (MEMS)

Quantum effects

Scanning probe microscopy (SPM)

Sensor

Surface chemistry

期刊

MRS Bulletin

IF:

4.9

论文数:

5.3K

被引数:

9.5K

机构

university of regensburg

学者数:

1.6W

论文数: 1.2W

被引数: 11

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