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Capacitive detection scheme for space accelerometers applications
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DOI：10.1016/S0924-4247(99)00227-7.png)
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摘要
En 中文
This paper presents the design and performance of an ultra-sensitive position sensor dedicated to future space accelerometers. The electromechanical transducer is based on a capacitive scheme and aims at detecting the motion of a proof-mass in an electrostatic accelerometer. A new design called area variation capacitance is investigated to minimize back-action forces exerted on the proof mass. The resolution of that position sensor is a few tenths of picometer in the 0-1 Hz bandwidth. The position is digitized with a sigma-delta converter to feed the control laws of the accelerometer. (C) 1999 Elsevier Science S.A. All rights reserved.
Keyword:
capacitive sensors
accelerometer
electrostatics
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IF:
4.9
论文数:
1.5W
被引数:
3.3W
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