Conductive AFM for CNT characterization

Marius Toader

doi:10.1186/1556-276X-8-24

2013-01-11

DOI：10.1186/1556-276X-8-24

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摘要

En 中文

We report on and emphasize the versatility of conductive atomic force microscopy in characterizing vertically aligned carbon nanotubes (CNTs) aimed to be used in via interconnect technology. The study is conducted on multi-walled CNT arrays vertically grown on a copper-based metal line. Voltage-dependent current mapping and current-voltage characteristics recorded down to single CNT allow for a comprehensive insight into the electric behaviour of the hybrid structure.

Keyword:

Multi-walled carbon nanotubes

CNT

Conductive AFM

Atomic force microscopy

Interconnect system

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期刊

Nanoscale Research Letters

IF:

4.1

论文数:

6.5K

被引数:

1.8W

机构

Technische Universitat Chemnitz

学者数:

3.3K

论文数: 2.8K

被引数: 23

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