Customizable sub-nanometer vertical-step grayscale lithography

2026-01-21

0

PRE

AI

H

Haonan Ma

S

Shijie Zhao

刘

刘霞 (Xia Liu)

Z

Ziying Hu

X

Xu Han

李宏韬 (Hongtao Li)

Z

Zeming Jin

M

Mingdi Zhang

J

Jixiang Li

W

Wenke Fu

Y

Yunyun Dai

Y

Yuan Huang

Y

Yeliang Wang

DOI：10.1016/j.scib.2026.01.044

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