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Database in low temperature plasma modeling
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DOI：10.1016/S0169-4332(02)00034-X.png)
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This article is composed of recommended sets of electron collision cross-sections and reaction cross-sections of excited species assessedby a swam method and of information on transport coefficients and reaction rates (cross-sections) of ions, which are needed in low temperature plasma modeling. These data have been piled up by the Investigation Committee on Discharge Plasma Electron Collision Cross-sections, IEE Japan, and the author's laboratory. The gases taken for the assessment in this work are rare gases, Hg, N-2, O-2, CO2, CF4, CH4, GeH4, SiH4, SF6, C2H6, Si2H6, C-C4H8 and CCl2F2. (C) 2002 Elsevier Science B.V. All rights reserved.
Keyword:
database
electron collision
plasma modeling
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期刊
IF:
6.9
论文数:
6.2W
被引数:
19.4W
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