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Definitive correction for nonlinear and random phase-step detuning using the universal phase-shifting algorithm
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AI
DOI：10.1364/AO.583351.png)
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Abstract
En 中文
Nonlinear or random phase-step detuning, induced by environmental and instrumental instabilities, remains a pervasive challenge in phase-shifting interferometry. This detuning error undermines the accuracy of standard linear phase-shifting algorithms (PSAs) and compromises the reliability of optical surface metrology. This work introduces a definitive solution: the universal phase-shifting algorithm (UPSA) as a universal post-processing corrector. We demonstrate that a single application of the UPSA transforms the erroneous, detuned output of any linear PSA into a perfect quadrature signal, recovering phase accuracy comparable to an ideal, well-tuned measurement. The UPSA operates blindly, requiring no estimation of the nonuniform phase-steps, and is uniquely effective at correcting linear PSAs with just three interferograms-a significant advantage over methods requiring extensive data sets. Crucially, we validate its robustness against noise and strong fringe amplitude variations using an unmodified commercial interferometer under standard optical-shop conditions. Therefore, the UPSA is not merely a theoretical improvement but an essential practical advancement, finally enabling trustworthy, high-precision phase measurements in both research and production environments. (c) 2026 Optica Publishing Group. All rights, including for text and data mining (TDM), Artificial Intelligence (AI) training, and similar technologies, are reserved.
Keywords:
PRINCIPAL COMPONENT ANALYSIS
INTERFEROMETRY
EXTRACTION
ERROR
INTERFEROGRAMS
RETRIEVAL
DESIGN
Journal
A
IF:
1.7
Papers:
968
Citations:
5.1W