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DiffPattern-Flex: Efficient Layout Pattern Generation via Discrete Diffusion

delete2025-05-12
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PRE
AI
Z
Zixiao Wang
W
Wenqian Zhao
Y
Yunheng Shen
白杨 cover
白杨 (Yang Bai)
G
Guojin Chen
F
Farzan Farnia
B
Bei Yu
DOI:10.1109/TCAD.2025.3569493delete
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Abstract

Abstract

En 中文
Recent advancements in layout pattern generation have been dominated by deep generative models. However, relying solely on neural networks for legality guarantees raises concerns in many practical applications. In this article, we present $\textsf {DiffPattern}$ -Flex, a novel approach designed to generate reliable layout patterns efficiently. $\textsf {DiffPattern}$ -Flex incorporates a new method for generating diverse topologies using a discrete diffusion model while maintaining a lossless and compute-efficient layout representation. To ensure legal pattern generation, we employ an optimization-based, glass-box pattern assessment process based on specific design rules. Furthermore, fast sampling and efficient legalization technologies are employed to accelerate the generation process. Experimental results across various benchmarks demonstrate that $\textsf {DiffPattern}$ -Flex significantly outperforms existing methods and excels at producing reliable layout patterns.
Keywords:
Design for manufacturability (DFM)
diffusion models
legalization
pattern generation

Journal

I
IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems
IF:
2.9
Papers:
586
Citations:
9.6K

Organization

T
The Chinese University of Hong Kong
Scholars:
3.8K
Papers: 1.9K
Citations: 3
T
tsinghua university
Scholars:
11.8W
Papers: 10.0W
Citations: 137