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Digital holographic reflectometry
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DOI：10.1364/OE.18.003719.png)
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Digital holographic microscopy (DHM) is an interferometric technique that allows real-time imaging of the entire complex optical wave-front (amplitude and phase) reflected by or transmitted through a sample. To our knowledge, only the quantitative phase is exploited to measure topography, assuming homogeneous material sample and a single reflection on the surface of the sample. In this paper, dual-wavelength DHM measurements are interpreted using a model of reflected wave propagation through a three-interfaces specimen (2 layers deposited on a semi-infinite layer), to measure simultaneously topography, layer thicknesses and refractive indices of micro-structures. We demonstrate this DHM reflectometry technique by comparing DHM and profilometer measurement of home-made SiO2/Si targets and Secondary Ion Mass Spectrometry (SIMS) sputter craters on specimen including different multiple layers. (C) 2010 Optical Society of America
Keyword:
PHASE-CONTRAST MICROSCOPY
REFRACTIVE-INDEX
INTERFEROMETRY
COMPENSATION
SIMS
期刊
IF:
3.3
论文数:
6.1W
被引数:
14.3W
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