Dynamic low-coherence interferometry using a double Fizeau cavity

Yi Zong

doi:10.1364/OL.416939

2021-04-20

PRE

DOI：10.1364/OL.416939

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The coexistence of anti-vibration and a common optical path is difficult to realize in dynamic Fizeau interferometry. To address this problem, we propose a dynamic low-coherence interferometry (DLI) using a double Fizeau cavity. The DLI method is a new optical model that creatively renders both surfaces of the RM to interfere with the test surface, utilizing a low-coherence source and optical path matching to construct the common-path p-polarized Fizeau cavity (p-FC) and carrier-frequency s-polarized Fizeau cavity (s-FC). The relative tilt phases of the s-FC are calculated using the carrier frequency interferograms; then the final phase is retrieved with the relative tilt phases and p-FC interferograms. The experimental results demonstrate that the DLI method can provide high-precision phase measurement in a vibration environment. (C) 2021 Optical Society of America

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VIBRATION

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Optics Letters

IF:

3.3

论文数:

4.0W

被引数:

7.6W

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