.png){kind=icon}
返回
Dynamic spectroscopic imaging ellipsometry
.png){kind=icon}
PRE
AI
DOI：10.1364/OL.451064.png)
.png){kind=icon}
原文求助.png){kind=icon}
分享.png){kind=icon}
收藏
摘要
En 中文
A dynamic spectroscopic imaging ellipsometer (DSIE) employing a monolithic polarizing interferometer is described. The proposed DSIE system can provide spatio-spectral ellipsometric phase map data Delta(lambda, x) dynamically at a speed of 30Hz. We demonstrate the ultrafast mapping capability of the spectroscopic ellipsometer by measuring a patterned 8-inch full wafer with a spatial resolution of less than 50 x 50 mu m(2) in an hour. (C) 2022 Optica Publishing Group
期刊
IF:
3.3
论文数:
4.0W
被引数:
7.6W
机构
查看更多机构
引用论文
Matrix metalloproteinases (MMP) and cathepsin K contribute differently to osteoclastic activities
PREAI
分享收藏Parallel spectroscopic ellipsometry for ultra-fast thin film characterization.png)
OPTICS EXPRESS
OAAI
OPTICS EXPRESSIF3.3
OAAI分享收藏Spectral interferometric technique to measure the ellipsometric phase of a thin-film structureOPTICS LETTERSOAAI
OPTICS LETTERSIF3.3
OAAI分享收藏
没有更多内容