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Enhancing mechanical properties, corrosion behavior, and electrocatalytic activity of reactively sputtered NiFeCrVTi films by nitrogen addition
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DOI：10.1016/j.vacuum.2026.115561.png)
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Abstract
En 中文
As a branch of high-entropy alloys (HEAs), high-entropy alloy nitrides (HEANs) have exhibited outstanding performance in the field of protective coatings. However, the functional application of HEANs in the oxygen evolution reaction (OER) for water splitting remains underexplored. In this work, (NiFeCrVTi)Nx HEAN films were deposited via magnetron sputtering with varying nitrogen fractions (FN = N2/(N2 + Ar)) ranging from 0% to 30%. The effects of nitrogen addition on their microstructure, chemical composition, mechanical properties, corrosion resistance, and electrocatalytic performance were systematically investigated.The results indicate that HEA films deposited at FN = 0% exhibited an amorphous structure with a very smooth surface (RRMS = 1.4 nm), while an FCC structure with (111) or (200) preferred orientation and a rougher surface with a larger RRMS (4.1∼8.7 nm) were obtained for those HEAN films deposited at FN = 10-30%. The (NiFeCrVTi)Nx HEAN films became harder and more resistant to corrosion upon the addition of nitrogen, probably due to the solid-solution strengthening effect and the formation of multiple metal-nitrogen bonds. The decrease in the corrosion current density of HEAN films in a 3.5% NaCl solution was approximately three orders of magnitude compared to the corresponding HEA films. Electrocatalytic OER testing indicates that the HEAN films exhibit outstanding electrocatalytic activity with an overpotential of only 298 mV at 10 mA cm−2 and stable performance over 28 h. This work broadens the application of HEAN films in the field of electrocatalysis, providing guidance for the preparation of water splitting electrodes for extreme environments.
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3.9
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1.4W
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2.5W
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