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Experimental Study on the Formation of Vacuum Anodic Arc by Resistance-Triggered Pulsed Discharge
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DOI：10.1007/s11090-026-10683-3.png)
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Abstract
En 中文
Compared with the cathodic arc of vacuum arcs, the anodic arc typically exhibits higher ion current intensity and can effectively avoid the problem of cathodic arc droplets, thus possessing unique advantages in application fields such as pulsed ion sources and thin film deposition. Based on the resistance-triggering method, through the rational combination of electrode structure (small anode - large cathode) and µs-pulse discharge parameters, a reproducible anodic arc for high-melting-point metals has been achieved. Due to differences in thermal conductivity and other properties among various metal materials, the formation time and intensity of the corresponding anodic arc vary. In the experiment, an intensified high-speed camera was used to capture the anodic arc formation processes of copper, titanium and molybdenum, while transient emission spectroscopy was employed to obtain the evolution laws of atomic and ionic line intensities during anodic arc development. The results indicate that the formation of anodic arc is related to the discharge voltage and duration of the initial high-voltage stage. Increasing the trigger resistance to the trigger anode enhances the anodic arc discharge intensity by shifting the discharge to the main anode. Additionally, increasing the electrode gap also increases the anodic arc discharge intensity. Both effects are accompanied by an increase in the discharge voltage and duration of the high-voltage stage. Langmuir triple probe measurements show that the electron temperature during anodic arc can exceed 3 eV, and the electron density at 1 cm from the jet reaches up to 2.7 × 1019 m− 3. At an arc current of 150 A, the measured ion current intensity of the Cu anodic arc is 16.9 A, with an ion-to-arc current ratio of 11.5%—twice that of the Cu cathodic arc (5.6%), demonstrating that the anodic arc ion possesses higher ion current intensity.
Keywords:
Vacuum arc
Anodic arc
Pulsed discharge
Trigger
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