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Femtosecond laser surface modification induced the tunable of nonlinear optical property of single-crystal silicon
DOI:10.1016/j.optmat.2024.116453.png)
Abstract
En 中文
Tunable nonlinear optical properties were realized by femtosecond laser surface modification of single-crystal silicon with periodic grating-like structures. The as-modified samples exhibit a nonlinear behavior with a transition from reverse saturation absorption (RSA) to saturation absorption (SA) with the increase of laser power due to the introduction of oxide and defect in Si. The maximum third-order nonlinear absorption coefficients can reach -1.16 x 10-4 cm/W. And the epsilon-near-zero wavelength of as-modified samples can be tuned from 191 nm to 508 nm. The finite-difference time-domain simulation results are in good agreement with the test results of the samples.
Keywords:
Third-order nonlinear
ENZ
Single-crystal silicon
Femtosecond laser surface modification
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