.png){kind=icon}
返回
Flexible membrane pressure sensor
.png){kind=icon}
PRE
AI
DOI：10.1016/j.sna.2004.10.012.png)
.png){kind=icon}
原文求助.png){kind=icon}
分享.png){kind=icon}
收藏
摘要
En 中文
A new flexible low-pressure sensor design with convention architectures of n-type doped hydrogenated amorphous silicon with metal-on-amorphous silicon contacts on flexible substrate is fabricated. The sensing elements are wired according to a full Wheatstone-bridge layout, to reduce any temperature effects. These low-pressure sensors are subjected to repetitive strains/pressure testing. The experiment demonstrates a linear pressure relationship in the 0-2.0 psi range with a sensitivity of 1.953 +/- 0.020 mV/root psi. The measurements observed are in good agreement with the analytical solution. (c) 2004 Published by Elsevier B.V.
Keyword:
flexible substrate
pressure sensor
membrane
AI总结
对已上传原文的论文进行重点信息的提取，主要内容包括：简要概述、研究摘要、背景介绍、关键亮点、图文解析、展望与总结。
期刊
IF:
4.9
论文数:
1.5W
被引数:
3.3W
机构
暂无机构信息
引用论文
Application of aluminum films as temperature sensors for the compensation of output thermal shift of silicon piezoresistive pressure sensors铝膜作为温度传感器在硅压阻式压力传感器输出热漂移补偿中的应用
PREAI
分享收藏Contrast in soil microbial metabolic functional diversity to fertilization and crop rotation under rhizosphere and non-rhizosphere in the coal gangue landfill reclamation area of Loess Hills.png)
PLOS ONE
OAAI
PLOS ONEIF0
OAAI分享收藏 没有更多内容
没有更多内容