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Flexible membrane pressure sensor

delete2005-04-01
delete119
PRE
AI
H
Hee C. Lim
B
Brian Schulkin
M
M.J. Pulickal
S
Shining Liu
R
R. Petrova
G
G. A. Thomas
S
S. Wagner
K
K. Sidhu
J
John F. Federici
DOI：10.1016/j.sna.2004.10.012delete
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Abstract

Abstract

En 中文
A new flexible low-pressure sensor design with convention architectures of n-type doped hydrogenated amorphous silicon with metal-on-amorphous silicon contacts on flexible substrate is fabricated. The sensing elements are wired according to a full Wheatstone-bridge layout, to reduce any temperature effects. These low-pressure sensors are subjected to repetitive strains/pressure testing. The experiment demonstrates a linear pressure relationship in the 0-2.0 psi range with a sensitivity of 1.953 +/- 0.020 mV/root psi. The measurements observed are in good agreement with the analytical solution. (c) 2004 Published by Elsevier B.V.
Keywords:
flexible substrate
pressure sensor
membrane
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Journal

Sensors and Actuators A-Physical cover
Sensors and Actuators A-Physical
IF:
4.9
Papers:
1.5W
Citations:
3.3W

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No organization information available