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Fluid depth sensor using surface acoustic wave resonator

delete2024-05-09
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PRE
AI
S
Sreejith, V. S. *
M
Masoud Naghdi
M
Muhammad Zubair Aslam
M
Mitali Hardik Desai
S
Shuai Ju
S
Sai K. Chinka
H
Haifeng Zhang
DOI:10.1117/12.3010985delete
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摘要

摘要

En 中文
Fluid depth measurement finds practical applications across various industries, including petroleum, water treatment processes, nuclear technology, and household appliances. Traditional methods include magnetic, radiation, linear variable differential transformers, LASER, pressure, capacitive, float, conductivity probe, fiber optics, ultrasonic, and triple bubbler sensors. Despite its promising attributes, such as suitability for low to very high-temperature environments, wireless interrogation, battery-less operation, and compact size, the application of piezoelectric Surface Acoustic Wave (SAW) sensors in fluid depth measurement has been comparatively unexplored in the current body of literature. This research presents a depth gauge engineered for fluid depth assessment employing a Surface Acoustic Wave (SAW) resonator. The apparatus comprises a 20 mu m thick aluminum diaphragm, with a quartz SAW resonator affixed to it. Employing an 868 MHz quartz SAW resonator enables the precise measurement of minute depth variations, with a remarkable sensitivity of 532 Hz/mm (equivalent to 0.61 ppm/mm), allowing for accurate detection of changes as small as 1 mm.
Keyword:
Depth gauge
pressure sensor
SAW
strain measurement

期刊

A
Active and Passive Smart Structures and Integrated Systems
IF:
0
论文数:
58
被引数:
0

机构

U
university of north texas denton
学者数:
4.4K
论文数: 3.9K
被引数: 10
U
University of North Texas System
学者数:
8.1K
论文数: 7.7K
被引数: 178
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