Four-axis micro measuring systems performance verification

doi:10.1016/j.cirp.2014.03.033

Four-axis micro measuring systems performance verification

2014-01-01

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DOI：10.1016/j.cirp.2014.03.033

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This article describes the performance verification of 3D optical measuring instruments integrating a rotational axis using an artifact. The goal is the performance verification of four-axis measuring systems for the full 3D acquisition of micro-geometric parts. This type of measurement has many potential applications, such as in micro-tool, micro-mold, or micro-device manufacturing. The artifact is as simple as possible to reduce manufacturing costs, ensure easy calibration, comply with the ISO 10360 standard and consider all volumetric error contributions. The artifact may be useful to both measuring system manufacturers and users to provide a measurement traceability path. (C) 2014 CIRP.

Keyword:

Performance

Measuring instrument

Micro metrology

Four-axis micro measuring systems performance verification

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