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Fourier-transform optical microsystems
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DOI：10.1364/OL.24.000844.png)
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摘要
En 中文
The design, fabrication, and initial characterization of a miniature single-pass Fourier-transform spectrometer (FTS) that has an optical bench that measures 1 cm x 5 cm x 10 cm is presented. The FTS is predicated on the classic Michelson interferometer design with a moving mirror. Precision translation of the mirror is accomplished by microfabrication of dovetailed bearing surfaces along single-crystal planes in silicon. Although it is miniaturized, the FTS maintains a relatively high spectral resolution, 0.1 cm(-1), with adequate optical throughput. (C) 1999 Optical Society of America.
Keyword:
FIBEROPTIC SWITCH
MICROJOINERY
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