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Fully integrable magnetic field sensor based on delta-E effect
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DOI：10.1063/1.3664135.png)
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A fully integrable magnetic field sensor based on magnetic microelectromechanical systems is presented. The approach yields high application potential since it is compatible with standard micromachining techniques, operates at room-temperature, and provides high bandwidth and vector field capability. The demonstrator presented in this work consists of a tipless commercial atomic force microscope cantilever which is coated with an amorphous thin film layer of (Fe(90)Co(10))(78)Si(12)B(10). Amplitude and frequency of magnetic fields are measured via the modulation of the oscillation of the microcantilever via the delta-E effect of the FeCoSiB coating. (C) 2011 American Institute of Physics. [doi:10.1063/1.3664135]
Keyword:
atomic force microscopy
boron alloys
cantilevers
coatings
cobalt alloys
iron alloys
magnetic field measurement
magnetic sensors
micromachining
micromechanical devices
microsensors
silicon alloys
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3.6
论文数:
10.4W
被引数:
17.8W
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