.png){kind=icon}
.png){kind=icon}
Return
Functional vanadium oxide nanostructures fabricated via atomic layer deposition: A review
.png){kind=icon}
OA
AI
C
R
M
R
K
DOI：10.1016/j.apmt.2026.103248.png)
.png){kind=icon}
.png){kind=icon}
Share.png){kind=icon}
Save
Abstract
En 中文
• Comprehensive review of ALD process parameters for fabrication of VxOy nanostructures. • Combining nanostructured substrates, VxOy ALD, and post processing for various applications. • Tailor-made VxOy nanostructures enable widely tunable functional properties. • Challenges remain in VxOy phase control and long-term stability.
Keywords:
Vanadium oxide
Nanostructures
Atomic layer deposition
Thermal annealing
Phase control
Functional oxides
AI Summary
Key information extracted from the uploaded paper, including a brief overview, abstract, background, key highlights, visual analysis, and future outlook.
Journal
IF:
6.9
Papers:
3.2K
Citations:
1.6W
Organization
Cited Papers