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High-accuracy deflectometric microscope system with a large slope range
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DOI：10.1364/OL.420447.png)
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We propose an off-axis deflectometric microscope system for microscopic surface testing with both high measurement accuracy and a large slope dynamic range. A high-luminance liquid crystal display directly illuminates the tested sample with coded fringes, and then the reflected fringes passing through a microscope objective are captured by a pinhole camera, from which the deflectometric microscopic testing with a large slope range can be achieved. The accuracy of the proposed system is validated numerically and experimentally, and a large measurable slope dynamic range is also demonstrated. The proposed system provides a feasible way with the slope range in the order of sub-radians and sag resolution better than 0.05 nm. (C) 2021 Optical Society of America
Keyword:
SHAPE MEASUREMENT
MICRODEFLECTOMETRY
期刊
IF:
3.3
论文数:
4.0W
被引数:
7.6W
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