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High-Contrast Grating VCSELs

delete2009-05-01
delete97
PRE
AI
Y
Ye Zhou
H
Huang, Michael C. Y.
C
C. Chase
DOI:10.1109/JSTQE.2009.2015195delete
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摘要

摘要

En 中文
Recent advances in a single-layer 1-D high-index-contrast subwavelength grating structure are reviewed. Its incorporation into a vertical-cavity surface-emitting laser (VCSEL) structure enabled simple fabrication, lithographically defined polarization control and large aperture, single-transverse-mode control. Extraordinarily large fabrication tolerance is demonstrated with 20% variation of the high-contrast grating (HCG) critical dimension. Emission wavelength of HCG-VCSEL varied 0.2% with a 40% change in lithography linewidth. Tunable VCSELs are fabricated using HCG, which led to a 8000 times reduction in the tunable mirror size and 160 times improved tuning speed of 63 ns. This configuration will open the door for a wide spectrum of optoelectronic devices in large wavelength regimes.
Keyword:
High-contrast subwavelength grating
optical MEMS
optical communication
vertical-cavity surface-emitting laser (VCSEL)

期刊

I
IEEE Journal of Selected Topics in Quantum Electronics
IF:
5.1
论文数:
5.6K
被引数:
1.2W

机构

University of California System 封面图
University of California System
学者数:
37.7W
论文数: 33.8W
被引数: 6.6K
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