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High-precision absolute linear encoder based on a standard calibrated scale
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DOI：10.1016/j.measurement.2018.03.071.png)
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摘要
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This paper presents the full research and development cycle of a high-precision absolute linear encoder based on a standard calibrated scale. Already available and used in industry standard scales of invar alloy were employed in the study. The scales have incremental indexes with 1 mm spacing intervals without an absolute code. However, the existing technical task is to measure the absolute position in the range of 2 m with accuracy less than 5 mu m. For that, the developed encoder rationally combines magnetic measuring channel for the index numbering and an optical channel for the precise estimation of the encoder position. First, for the development, a simulation was performed to synthesize and analyze an image of an index. This image was used to develop a real-time double-threshold image processing algorithm to estimate the index position. Later the developed image processing algorithm was verified by preliminary testing and supported by a presented three-stage calibration procedure. The final measurements proved that the designed and developed encoder has the accuracy of 1.65 mu m (3 standard deviations) at the speed up to 3 m/s. The possibility of use of standard calibrated scales with the presented encoder to solve existing and new industrial tasks forms the value of this paper. A possible use of the existing scales also provides unification and compatibility with conventional metrology equipment
Keyword:
Linear optical encoder
Imaging encoder
Invar scale
High-precision measurements
Automatic positioning
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期刊
IF:
5.6
论文数:
2.1W
被引数:
5.4W
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