High precision wavefront correction method in interferometer testing

doi:10.1364/OE.526063

2024-06-20

DOI：10.1364/OE.526063

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摘要

En 中文

A wavefront correction method is proposed for high-precision optic surfacing, addressing the discrepancy between wavefront and real surface errors in Fizeau interferometer testing. We believe this to be a proposed novel method that encompasses optical surface function parameters fitting, lateral distortion correction, misalignment error removal, and sag surface error calculation. The method's error has been thoroughly analyzed, including aspects of function parameters fitting, ray tracing, and interpolation. The effectiveness of the method was demonstrated by correcting the wavefront of an off-axis parabolic mirror in null testing configurations, significantly reducing artificially created annular errors and improving off-axis direction errors from 0.23 lambda lambda to 0.05 lambda lambda (lambda=632.8 lambda= 632.8 nm), with the PV of aspheric departures exceeding 8.5 mm. (c) 2024 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement

Keyword:

DISTORTION COMPENSATION

LATERAL DISTORTION

LENGTH

期刊

Optics Express

IF:

3.3

论文数:

6.1W

被引数:

14.3W

机构

chinese academy of sciences

学者数:

56.7W

论文数: 45.0W

被引数: 704

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