High-speed wavefront sensor compatible with standard CMOS technology

Monteiro, DWD

doi:10.1016/j.sna.2003.10.039

2004-01-01

PRE

Monteiro, DWD

Gleb Vdovin

P.M. Sarro

DOI：10.1016/j.sna.2003.10.039

原文链接

摘要

En 中文

This paper addresses the design, implementation and performance of an integrated Hartmann (-Shack) wavefront sensor suitable for real-time operation and compatible with standard CMOS technology. A wavefront sensor can be used to detect distortions in the profile of a light beam or indirectly in that of an optical component. Such a sensor can also be coupled to a deformable mirror to enable the compensation of the detected distortions in a light beam. These adaptive optical systems find more and more applications in astronomy, industry and have recently been introduced in medical setups. We use the Hartmann wavefront-sensing method, in which a light beam is sampled into a number of sub-beams, which are projected on a plane. The displacements of the light spots on this plane are used to estimate the profile of the associated arbitrary wavefront. Usually, a conventional image sensor registers the light spots and an image-processing algorithm computes their displacements from a reference grid. However, this approach restricts the operational speed of the sensor because it relies on the frame-transfer rate of the imager and on the rather slow data-reduction algorithm. The novel contribution of this work is that, to render faster operation, we introduce a Hartmann wavefront sensor that uses an addressable matrix of CMOS integrated position-sensitive detectors, namely quad cells. Each sampled light spot is associated with a quad cell such that direct information about the spot-centroid displacement is available. Each particular application has its own requirements and, the developed sensor, which should be used with light sources in the visible spectrum, shall perform well for applications involving enough light (>0.5 mW beams), and there where lower-order wavefront aberrations are expected (<30 Zernike terms). However, this sensor can be modified in a variety of ways to attend to particular applications. The fabricated sensor allows operation at rates higher than 3 kHz. (C) 2003 Elsevier B.V. All rights reserved.

Keyword:

wavefront sensor

adaptive optics

position-sensitive detector

quad cell

CMOS

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期刊

Sensors and Actuators A-Physical

IF:

4.9

论文数:

1.6W

被引数:

3.3W

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