.png){kind=icon}
返回
High-Temperature Self-Compensating Absolute Micro-Pressure Sensor and Its Testing Method
.png){kind=icon}
PRE
AI
DOI：10.1109/JSEN.2022.3223981.png)
.png){kind=icon}
原文求助.png){kind=icon}
分享.png){kind=icon}
收藏
摘要
En 中文
In this study, we designed an absolute pressure micro-pressure sensor, with its testing method based on the requirements of high-temperature resistance, self-compensation, and micro-pressure test. The substrate of the sensor is made of raw porcelain through high-temperature sintering, and the functional layer is integrated into the surface of the substrate by silver paste through a screen-printing process. Therefore, the sensor has high temperature resistance. The ceramic base of the sensor is prepared based on the principle of film stress and strain measurement of micro pressure by filling carbon film in rawporcelain layer and using a high-temperature sintering process to obtain an airtight cavity structure. In the preparation of the functional layer, a unique differential capacitance structure is constructed on the surface of the substrate using the screen-printing process. This hardware temperature self-compensation structure enables the high-precision measurement of the sensor. Finally, the high temperature and absolute pressure micropressure sensor are combined with aC- V conversion circuit to complete the test on the high-temperature-micro pressure composite test platform. The experimental results show the sensor can measure the absolute pressure from 3 to 100 kpa in the temperature range of 23 degrees C to 300 degrees C, and the repeatability error of the pressure test is less than 3.3% at 300 degrees C.
Keyword:
Temperature sensors
Temperature measurement
Capacitance
Atmospheric measurements
Porcelain
Substrates
Sintering
Absolute pressure
high temperature
micro pressure
pressure measurement
sensor
期刊
IF:
4.5
论文数:
2.2W
被引数:
7.3W
机构
引用论文
High-temperature fiber-optic Fabry-Perot interferometric pressure sensor fabricated by femtosecond laser飞秒激光高温光纤法布里-珀罗干涉压力传感器.png)
OPTICS LETTERS
OPTICS LETTERSIF3.3
PREAI
分享收藏Micropatterned elastic ionic polyacrylamide hydrogel for low-voltage capacitive and organic thin-film transistor pressure sensors用于低压电容和有机薄膜晶体管压力传感器的微图案化弹性离子聚丙烯酰胺水凝胶NANO ENERGY
NANO ENERGYIF17.1
PREAI
分享收藏Diaphragm-Free Fiber-Optic Fabry-Perot Interferometric Gas Pressure Sensor for High Temperature Application用于高温应用的无隔膜光纤法布里-珀罗干涉式气体压力传感器SENSORS
OAAI
SENSORSIF3.5
OAAI分享收藏Advanced Liquid-Free, Piezoresistive, SOI-Based Pressure Sensors for Measurements in Harsh EnvironmentsSENSORSOAAI
SENSORSIF3.5
OAAI分享收藏Piezoelectric pressure sensor based on flexible gallium nitride thin-film for harsh-environment and high-temperature applications用于恶劣环境和高温应用的基于柔性氮化镓薄膜的压电式压力传感器
PREAI
分享收藏A High-Temperature Piezoresistive Pressure Sensor with an Integrated Signal-Conditioning Circuit具有集成信号调理电路的高温压阻式压力传感器SENSORSOAAI
SENSORSIF3.5
OAAI分享收藏
查看更多内容