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Highly sensitive ionic pressure sensor with broad sensing range based on interlaced ridge-like microstructure
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DOI：10.1016/j.sna.2020.112173.png)
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Owing to fast response speed and excellent repeatability, flexible capacitive pressure sensors are important for electronic skin and human-machine interaction. However, it is still challenging for the capacitive pressure sensors to meet the requirements of various applications with limited sensitivity in a narrow range. Herein, a flexible capacitive pressure sensor with an ionic dielectric layer is reported. Taking advantages of the interlaced ridge-like microstructure (IRM) of the ionic dielectric layer, this device is able to detect the pressure from 1 Pa to 300 kPa. Meanwhile, the sensitivity of the sensor is 92 kPa(-1) in the low pressure range (<0.4 kPa), 45.04 kPa(-1) in the middle pressure range (0.4 kPa-20 kPa) and 8.5 kPa(-1) in the high pressure range (20 kPa-100 kPa). In addition, the sensor exhibits a short dynamic response time of similar to 45 ms and high mechanical stability of over 6000 cycles. Finally, we demonstrated a few practical applications that need broad pressure sensing range, such as liquid evaporation monitoring and human arm bending detecting. The sensor and fabrication method reported here provides a simple and low-cost scheme to fabricate pressure sensors with promising performance. (C) 2020 Elsevier B.V. All rights reserved.
Keyword:
Flexible pressure sensor
Ionic dielectric layer
Interlaced ridge-like microstructure
Electrical double layer
Flexible electronics
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4.9
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1.5W
被引数:
3.3W
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