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In-situ Ti-C interfacial engineering for high-performance CNT cold cathodes and micro-focus X-ray sources
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DOI：10.1016/j.vacuum.2026.115569.png)
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Abstract
En 中文
In this work, a high-performance CNT cold cathode utilizing a “Ti/Al/Fe” gradient film was developed for micro-focus X-ray sources. XPS analysis confirmed the in-situ formation of a Ti-C interface layer, which facilitates Ohmic contact and robust adhesion. In comparison with the Al/Fe CNT cathode, the Ti/Al/Fe CNT cathode exhibits lower turn-on and threshold fields of 2.45 and 3.87 V/μm, respectively, and better emission stability over a 60-h continuous test. Furthermore, a reflective micro-focus X-ray source based on Ti/Al/Fe CNT cathode was constructed, which achieved an effective focal spot size of ∼38 μm. Images of a small fish specimen exhibited clear skeletal structures, and standard line-pair card analysis revealed a spatial resolution of ∼71 μm. These results suggest that Ti/Al/Fe cathodes show great potential for long-life X-ray imaging applications.
Keywords:
Carbon nanotube
Magnetron sputtering
Ti buffer layer
Field emission
Micro-focus X-ray source
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