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Inverted-Rib Chalcogenide Waveguides by Solution Process
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DOI：10.1021/ph400107s.png)
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This paper studies the fabrication and characterization of solution-processed chalcogenide waveguides by a microtrench filling method. In this process, channels are etched on substrates and backfilled with solution-dissolved arsenic sulfide before being annealed. The waveguides are homogeneous in elemental composition and have good mode confinement. Both simulation and experimental measurements confirm a dominant fundamental mode covering 2.5-2.8 mu m. We measure an optical loss of 1.87 dB/cm, which to our knowledge is the lowest among solution-processed waveguides.
Keyword:
chalcogenides
solution-process
glass
microtrench filling
arsenic sulfide
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