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Iterative algorithm for three flat test
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DOI：10.1364/OE.15.006809.png)
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摘要
En 中文
Absolute planarity measurements by interferometry are classically made using three flats, compared two by two in the course of four or more tests. Data reduction is performed with various analytical methods. Here we present instead a data processing algorithm that converges to solution numerically by iteration. Examples are presented both on synthetic interferograms and on experimental data. High accuracy and versatility of the approach are demonstrated. (C) 2006 Optical Society of America.
Keyword:
FIZEAU INTERFEROMETER
ABSOLUTE MEASUREMENTS
FLATNESS STANDARD
OPTICAL-SURFACES
ROTATION METHOD
HIGH-ACCURACY
CALIBRATION
FLATS
PLANARITY
PROFILES
期刊
IF:
3.3
论文数:
6.1W
被引数:
14.3W
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